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Mechanistic evaluation of amorphous InGaZnO-based one transistor-one capacitor memory cell via fast current-voltage measurements and modeling.

Created on 09 Jul 2026

Authors

Juneseong Choi, Minsub Um, Hyobin Park, Jinheon Choi, Sahngik Aaron Mun, Jaewon Ham, Seoryong Park, Hyungjeung Kim, Shihyun Kim, Subin Moon, Jonghoon Shin, Cheol Seong Hwang

Published in

Nanoscale. Jul 09, 2026. Epub Jul 09, 2026.

Abstract

This study reports the fabrication and analysis of prototype one-transistor-one-capacitor (1T-1C) dynamic random-access memory (DRAM) cells with an amorphous indium-gallium-zinc oxide channel. Fast current-voltage measurements, supported by the H simulation program with integrated circuit emphasis (HSPICE), were used to examine transient charging and discharging operation in a laboratory-scale single-cell structure measured without an integrated sense amplifier. Distinct transient peaks in the measured current-time waveforms allowed for the direct extraction of the charge stored and released from the 1T-1C structure. Retention tests demonstrated that this transient method can monitor charge loss, with the stored charge retained within a loss of ∼1% over hold times of up to 3000 seconds. HSPICE simulations reconstructed the storage node potential (VS) and reproduced the major transient features, supporting the accuracy of the capacitance network interpretation. The analysis showed that parasitic capacitances within the 1T-1C device deviated the VS from the bit-line voltage, decreasing the sensing margin. This effect became more pronounced as parasitic capacitances increased for the given storage capacitance. This combined experimental and simulation framework provides a practical method for evaluating charging/discharging behavior and parasitic-coupling effects in prototype AOS-based 1T-1C memory cells.

PMID:
42423487
Bibliographic data and abstract were imported from PubMed on 09 Jul 2026.

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