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High-performance GeSn-on-SOI photodetector grown by selective epitaxy for C+L application.

Created on 01 Aug 2026

Authors

Zhipeng Liu, Yiling Hu, Zhi Liu, Jun Zheng, Yuhua Zuo, Tao Men, Guangze Zhang, Buwen Cheng

Published in

Optics letters. Volume 51. Issue 15. Pages 4360-4363. Aug 01, 2026.

Abstract

In this work, we demonstrate a high-performance GeSn photodetector fabricated on a silicon-on-insulator substrate using selective epitaxial growth. This method effectively confines the growth of the GeSn material to predefined regions, which enhances material quality and facilitates large-scale integration. The fabricated photodetector exhibits a high responsivity of 0.53 A/W and 0.23 A/W at 1550 nm and 1630 nm, respectively. Furthermore, the device demonstrates a low dark current density of 0.35 A/cm² and a bandwidth of 16 GHz. These results indicate that GeSn grown by selective epitaxy is capable of fabricating high-performance devices.

PMID:
42537188
Bibliographic data and abstract were imported from PubMed on 01 Aug 2026.

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