Authors
Ivan Devyataykin, Nikolay I Chkhalo, Sergey Garakhin, Svyatoslav Morozov, Alexander Perekalov, Boris Ulasevich, Pavel Veprev
Published in
The Review of scientific instruments. Volume 97. Issue 9. Sep 01, 2026.
Abstract
The paper presents the results of developing a laser-plasma source (LPS) for soft x-ray and extreme ultraviolet radiation intended for high-accuracy laboratory reflectometry. The design of key components of the LPS is described in detail. Plasma excitation is achieved using focused laser pulses with the following parameters: wavelength-1064 nm, pulse energy-800 mJ, duration-5 ns, frequency-10 Hz, divergence <5 mrad, impinging on a rotating solid target at an angle of 45° relative to normal incidence. To protect the optical input and monochromator optics from contamination by target debris, the vacuum chamber is equipped with magneto-gas-dynamic units. The source size measured as full width at half maximum (FWHM) was ∼56 μm, while the target surface oscillation amplitude during rotation was less than 5 μm. The operational wavelength range of the source spans 3-30 nm, within which spectral power density varies between 1 and 3 × 1013 photons/(0.1 nm × pulse × sr). The temporal stability of the signal over a 1-h observation period shows a standard deviation root-mean-square of 0.52%. The target lifetime is about one year.
PMID:
42803683
Bibliographic data and abstract were imported from PubMed on 28 Sep 2026.
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