Active Trimming of High-Speed SiN Photonic Micro Ring Resonators Using Thin Film Ferroelectrics.

Authors

Tom Vanmaele, Enes Lievens, Kobe De Geest, Ewout Picavet, Andreas Laemont, Dries Van Thourhout, Peter Bienstman, Jeroen Beeckman

Published in

Nanophotonics (Berlin, Germany). Volume 15. Issue 7. Pages e70059. Epub Apr 04, 2026.

Abstract

Fabrication of photonic devices needs nanometer-scale precision for devices to be in the optimal point of operation. Achieving this precision typically requires complex and costly post-fabrication processes or thermo-optic tuning using resistive heaters. In this work, we demonstrate active trimming of ring resonators on a SiN platform using a ${\text{Pb}\left(\text{Zr,Ti}\right)O}_3$ cladding layer. A DC bias is applied in order to tune an optical modulator in the optimal point of operation while maintaining a constant high-frequency response. This approach is promising for high-speed applications where precise tuning is critical.

PMID:
42846032
Bibliographic data and abstract were imported from PubMed on 08 Oct 2026.

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