Authors
Manjeet Mor, Manish Kumar Vishwakarma, Puneet Jain
Published in
The Review of scientific instruments. Volume 97. Issue 10. Oct 01, 2026.
Abstract
Ion beam implantation is an effective technology for material modification, including surface engineering, doping, and irradiation. Its use in laboratories is, however, not very common due to the expensive nature and rigidity of commercial systems. To address this gap, we present the design, simulation, fabrication, and characterization of a new, modular tabletop Penning Ion Gauge source system. This system uniquely integrates high-precision beam optics, including an electrostatic quadrupole triplet for beam focusing and a Wien velocity filter for ion species selection. IBSimu and COMSOL Multiphysics® were used to model the extraction system and downstream beam dynamics, respectively. Experiments demonstrated multi-species operation (H+, He+, N+) over a large operating energy range. A key achievement is the system's exceptionally broad, tunable beam current, with on-target currents spanning three orders of magnitude (1 nA-3 μA), accessed by adjusting the plasma discharge, gas pressure, and beam-transport conditions, delivered to an aperture-defined, approximately circular 0.5 cm2 on-target spot. The nitrogen transmission scan at 25 keV demonstrates coarse separation between N+ and N2+, with a first-order experimental resolving power of 2.43, as determined from the N+ peak. This system provides a reproducible and accessible platform, offering a useful and accessible resource for researchers in materials science, low-energy nuclear physics, and particle accelerators.
PMID:
42862044
Bibliographic data and abstract were imported from PubMed on 12 Oct 2026.
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