Authors
Jiabao Tang, Zifan Miao, Yunjing Zhang, Xingli He
Published in
Micromachines. Volume 17. Issue 10. Oct 18, 2026. Epub Oct 18, 2026.
Abstract
Laterally excited bulk acoustic wave resonators (XBARs) on lithium tantalate (LiTaO3, LT) are promising for wideband radio-frequency filters, but spurious modes and costly full-wave optimization hinder development. Limited coupling-bandwidth flexibility in commercial LT cuts motivates exploring non-standard orientations. We present a numerical framework integrating the finite-element method (FEM), coupling-of-modes (COM) theory, and artificial bee colony (ABC) optimization, emphasizing non-commercial 120° YX-LT. Hierarchical FEM screens orientation and periodic-cell response and then resolves finite aperture, busbars, and membrane boundaries. Compared with rectangular boundaries, an irregular pentagonal membrane disrupts coherent edge reflections, suppressing in-band spurious glitches and slightly enhancing effective coupling. A thickness-dependent COM model calibrated across a broad SiO2 loading range reproduces FEM resonance and antiresonance frequencies within 1 MHz. The surrogate enables mixed-variable ABC optimization of finger-pair number, normalized aperture, and stage-specific wavelengths. Five-stage ladder filters are synthesized and verified by direct FEM reconstruction. Stage-dependent wavelengths improve simulated passband transmission and reduce ripple versus a common-wavelength baseline; COM-FEM stopband discrepancies indicate the need for full-wave verification. After calibration, ABC core search takes approximately 2.9 h without repeated full-wave solutions. This transferable framework provides a cost-effective pathway from full-wave physics to circuit-level filter synthesis on thin-film piezoelectric platforms.
PMID:
42943960
Bibliographic data and abstract were imported from PubMed on 27 Oct 2026.
Read full publication at:
Please sign in
to see all details.
Advertisement
Stats
- Recommendations n/a n/a positive of 0 vote(s)
- Views 15
- Comments 0