Etchless resist-loaded microring resonators on thin-film lithium tantalate.

Authors

David Trop, Boris Desiatov

Published in

Optics letters. Volume 51. Issue 21. Pages 6107-6110. Nov 01, 2026. Epub Oct 09, 2026.

Abstract

We demonstrate monolithic, etchless dielectric-loaded microring resonators on thin-film lithium tantalate (TFLT), in which a lithographically patterned electron-beam resist strip (ARP 6200.13) serves as the permanent waveguide load on an unetched 300-nm lithium tantalate film. The devices achieve intrinsic quality factors up to 1.23×10⁶ in the C band and approximately 9.0×10⁵ in the O band, corresponding to propagation losses of approximately 0.4 dB/cm. To our knowledge, this is the first demonstration of resist-loaded microring resonators on TFLT and the highest intrinsic quality factor reported for a monolithic, etchless dielectric-loaded TFLT platform. These results establish dielectric loading as a fabrication-simplified route to high-Q integrated photonics on TFLT, reducing fabrication to a single lithography step without etching, dielectric deposition, or wafer bonding.

PMID:
42962135
Bibliographic data and abstract were imported from PubMed on 31 Oct 2026.

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