Authors
Sami Mohammed Alsharari
Published in
Applied radiation and isotopes : including data, instrumentation and methods for use in agriculture, industry and medicine. Volume 239. Pages 113089. Nov 06, 2026. Epub Nov 06, 2026.
Abstract
Knowledge of electron backscattering coefficients (BSCs) is important for applications in electron microscopy and surface analysis. However, while the available experimental data provide valuable reference data, reported experimental conditions do not always include sufficient information about target thickness, complicating direct validation of Monte Carlo (MC) simulations. In this study, we use MC simulations to investigate the angular dependence of BSCs for Al and Ag at incident energies of 20, 40, and 60 keV and angles ranging from 0° to 80°. Rather than using thickness as a fixed parameter, the target thickness was tuned to reproduce the experimental angular BSC trends, and the resulting thickness was normalized to the Kanaya-Okayama penetration depth through the T/APD ratio. The simulations reproduce the experimental angular trends with residuals generally within ±10%, with larger deviations occurring at selected conditions, reaching approximately 12% for Al at normal incidence and 5-8% near grazing incidence. The tuned thickness corresponded consistently to approximately 0.22-0.27 of the average penetration depth across the investigated energies. These results demonstrate that effective thickness normalization can provide a practical framework for comparing MC simulations with angular BSC measurements when experimental target thickness is not reported.
PMID:
42998564
Bibliographic data and abstract were imported from PubMed on 08 Nov 2026.
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